Product description
Sulfur hexafluoride (SF6) is a colorless, odorless, nontoxic, and nonflammable gas at atmospheric temperature. It is chemical stable with good insulation.
Physical properties
|
Commodity |
Sulfur hexafluoride |
|
Molecular Formula |
SF6 |
|
CAS No. |
2551-62-4 |
|
UN No. |
1080 |
|
Hazardous Class |
2.2 |
|
Standard Package Container |
40L/150 bar cylinder |
|
Cylinder Dimension |
Φ219x1500mm |
|
Filling Weight |
50Kg |
|
Grade Classification |
GB/T12022-2006 |
IEC36-71 |
High Purity |
||
|
3.5N |
4N |
5N |
|||
|
(SF6)% |
≥99.9 |
≥99.8 |
≥99.95 |
≥99.99 |
≥99.995 |
|
(Air)% |
≤0.04 |
≤0.05 |
≤0.03 |
≤0.003 |
≤0.003 |
|
(CF4)% |
≤0.04 |
≤0.05 |
≤0.03 |
≤0.003 |
≤0.003 |
|
Water ppm |
≤5 |
≤8 |
≤3 |
≤1 |
≤1 |
|
Acidity ppm |
≤0.02 |
≤0.3 |
≤0.15 |
≤0.1 |
≤0.1 |
|
Hydrolyze Fluoride ppm |
≤1 |
≤1 |
≤0.8 |
≤0.2
|
≤0.2 |
|
Mineral oil ppm |
≤4 |
≤10 |
≤3 |
≤0.1 |
≤0.1 |
|
Toxicity |
Non |
Non |
Non |
Non |
Non |
Main applications
SF6 is used in several non-electric and electronic applications. Processes have been developed for magnesium casting in which a protective atmosphere of SF6 based gas mixture prevent the formation of undesirable hyproducts. Other foundry applications are those employing N2/SF6 mixtures in aluminum casting as refining and degassing agents.
SF6 is also used in the semi-conductor industry, as etching gases for plasma etching or as cleaning gases to clean the chambers after the etching process.
Several minor applications are regarding leak detection, tracer gas studies, loud speakers and lasers.
